GATE 2013 ECE In IC technology, dry oxidation (using dry…

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GATE 2013 ECE
In IC technology, dry oxidation (using dry oxygen) as compared to wet oxidation (using steam or water vapor) produces

(A) superior quality oxide with a higher growth rate
(B) inferior quality oxide with a higher growth rate
(C) inferior quality oxide with a lower growth rate
(D) superior quality oxide with a lower growth rate

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